Electronic Specialty Gases
Our products are engineered for high precision and stability, serving applications in LED manufacturing, photovoltaics, fiber optics, and microelectronics. Every batch is produced under strict quality control with full traceability, ensuring safe, consistent performance for the most demanding environments.
Group V & VI Hydrides
Arsine (AsH₃)
- Grade: 99.9995%
- CAS Number: 7784-42-1
- Formula Weight: 77.95
Applications
- N-type doping, diffusion, and epitaxial growth of compound semiconductors such as gallium arsenide (GaAs)
Features
- Ultra-high purity and stability
- Uniform decomposition and low particle generation
- Suitable for MOCVD and VPE systems
Phosphine (PH₃)
- Grade: 99.9997%
- CAS Number: 7803-51-2
- Formula Weight: 33.99
Applications
- Semiconductor substrate and epitaxial layer growth, doping, and ion implantation
Features
- High purity and consistent delivery
- Excellent compatibility with high-volume production systems
- Widely used in the growth of InP, GaP, and related III–V materials
Hydrogen Selenide (H₂Se)
- Grade: 99.998%
- CAS Number: 7783-07-5
- Formula Weight: 80.98
Applications
- Manufacturing of II–VI semiconductors such as zinc selenide (ZnSe) and cadmium selenide (CdSe)
Features
- Low impurity content and high flow control accuracy
- Stable under controlled storage conditions
- Used in the production of infrared materials
Germane (GeH₄)
- Grade: 99.999%
- CAS Number: 7782-65-2
- Formula Weight: 76.64
Applications
- Epitaxial germanium and SiGe layer growth, solar cells, and fiber optics
Features
- Low impurity content and high flow control accuracy
- Stable under controlled storage conditions
- Used in the production of infrared materials
Group III & IV Hydrides
Diborane (B₂H₆)
- Grade: 99.999%
- CAS Number: 19287-45-7
- Formula Weight: 27.67
Applications
- P-type doping for semiconductors, epitaxial growth, and ion implantation
Features
- Excellent boron doping control
- Stable decomposition for consistent film quality
- Also used in specialty synthesis and high-energy research
Silane (SiH₄)
- Grade: 99.999%
- CAS Number: 7803-62-5
- Formula Weight: 32.12Applications
Applications
- Deposition of polycrystalline, amorphous, and epitaxial silicon layers in CVD processes
Features
- High reactivity and purity for large-area thin film applications
- Key source material for solar and semiconductor industries
- Stable and precise flow characteristics
Halides & Cleaning Gases
Nitrogen Trifluoride (NF₃)
- Grade: 99.999%
- CAS Number: 7783-54-2
- Formula Weight: 71.00
Applications
- Chamber and wafer surface cleaning in semiconductor, photovoltaic, and display manufacturing
Features
- High-efficiency plasma cleaning
- Lower global warming potential than perfluorocarbons
- Stable gas flow and minimal residue
Boron Trichloride (BCl₃)
- Grade: 99.999%
- CAS Number: 10294-34-5
- Formula Weight: 117.16
Applications
- Etching, cleaning, and doping in semiconductor processes
Features
- Reliable performance for plasma-based etching
- Also used as a catalyst and reagent in organic synthesis
- Corrosion-resistant delivery systems ensure safety and purity
Tetrachlorosilane (SiCl₄)
- Grade: 99.999%
- CAS Number: 10026-04-7
- Formula Weight: 169.90
Applications
- Precursor for high-purity silicon, fused silica, and optical fiber preform manufacturing
Features
- Stable vaporization and precise control
- Excellent optical-grade purity
- Commonly used in epitaxial silicon and fiber production
Quality, Safety, and Environmental Stewardship
Vital Materials maintains ISO 9001 and ISO 14001 certified production sites, ensuring exceptional consistency and reliability in every delivery. Each batch undergoes rigorous impurity testing, including H₂O, O₂, CO, CO₂, and CH₄ analysis. Cylinders are vacuum-purged, passivated, and verified under strict safety protocols.
Our global gas manufacturing facilities integrate advanced purification, closed-loop waste treatment, and gas recovery systems to reduce emissions and resource use. All products are supplied with a Certificate of Analysis (COA) and Material Safety Data Sheet (MSDS) for full traceability.
Applications
- Compound Semiconductors (GaAs, InP, GaN, ZnSe, CdSe)
- LEDs and Laser Diodes
- Solar Photovoltaics and Thin Films
- Fiber Optics and Infrared Materials
- High-Speed Microelectronics
Sustainability & ESG Commitment
Vital Materials
Vital Materials is committed to sustainable growth and responsible manufacturing. Through circular resource recovery, low-emission production, and supply chain transparency, we uphold the highest environmental, social, and governance (ESG) standards.
Our initiatives include:
- Recycling of spent gases and by-products
- Hazardous waste treatment and reclamation of rare and precious metals
- Responsible sourcing in line with OECD guidelines
- Continuous improvement in energy efficiency and emission reduction
Why Vital Materials
- Vertically integrated production and purification
- Global manufacturing footprint for supply stability
- Comprehensive safety and quality certifications
- Technical support from material selection to process optimization