Equipment
Meet FHR
Discover how FHR, a Vital Group company, designs and manufactures advanced vacuum coating systems for research, pilot-scale development, and high-volume manufacturing. Learn about the engineering expertise and thin-film technologies that strengthen Vital’s equipment portfolio.
Featured Production System
Line.2850.H-MD Inline PVD Coating System
Industrial sputtering platform designed for high-throughput deposition on large-format substrates, supporting advanced thin-film photovoltaic manufacturing and architectural glass applications.
Highlights
- Large substrates up to 1215 × 2300 mm
- >90% demonstrated uptime
- 20-second cycle time
- Substrate temperature up to 200C±5C
- Horizontal continuous inline production
- Uniform coating performance
- Processes including HJT, perovskite, low-E glass, and other thin-film photovoltaic technologies
Coating & Deposition Systems
Thermal Evaporation Systems
Our thermal evaporation platforms support materials such as metals, alloys, and certain compounds used in optical, electronic, and specialty thin-film applications. These systems are designed for consistency, repeatability, and ease of operation.
Typical Features
- Resistance and boat-based evaporation options
- Stable thermal control for predictable deposition rates
- Configurable chamber sizes for research or production environments
- Compatible with metals, metal alloys, and selected evaporation materials
Electron-Beam Evaporation Systems
Electron-beam evaporation enables high-purity, high-precision deposition of metals and compounds with elevated melting points. These systems accommodate a wide range of crucibles and material types.
Typical Features
- High-energy electron beam sources for efficient melting
- Suitable for high-temperature or high-purity evaporation materials
- Multi-pocket or single-pocket configurations
- Fine rate control for uniform thin-film formation
Sputtering Systems
Vital’s sputtering systems support ceramic, metallic, and precious-metal targets across R&D and production settings. Engineered for stability and uniform film thickness, these systems accommodate a broad range of target materials.
Typical Features
- DC, RF, or pulsed-DC configurations
- Magnetron sputtering technology for optimized efficiency
- Single-cathode and multi-cathode options
- Compatible with ceramic targets, metal targets, and precious metal targets
Ion-Assisted Deposition (IAD) Systems
IAD systems combine evaporation with ion-beam assistance to improve film density, adhesion, and long-term coating durability.
Typical Features
- Ion-beam enhancement for improved film properties
- Ideal for optical coatings requiring environmental resistance
- Supports multiple coating materials including oxides and fluorides
Vacuum System Components & Accessories
We offer a broad range of supporting components designed to integrate with our systems or with existing customer platforms.
Available Components
- Vacuum chambers and pumping systems
- Power supplies and controllers
- Fixturing and substrate holders
- Crucibles, boats, and evaporation sources
Engineering Support & Integration
Vital Materials provides application support and engineering guidance to help customers optimize system performance. Our teams assist with material selection, process setup, system configuration, and ongoing technical support.
Support Includes
- Process development guidance
- Material compatibility assistance
- Consumables and replacement parts
- Maintenance and troubleshooting support
Featured Solution: Roll Series
Explore VMET’s Roll Series vacuum coating systems and see how roll-to-roll processing supports scalable thin-film deposition for next-generation manufacturing.