Item | Unit | Semi-insulating Specifications | Semi-conduct Specifications |
---|---|---|---|
Conduct Type | n-type/p-type | ||
Crystal Growth Method | VGF | VGF | |
Dopant | Fe | S,Sn/Undoped/Zn | |
Diameter | inch | 2",3",4" | 2",3",4" |
Wafer Orientation* | (100)±0.5° | (100)±0.5° | |
OF/IF | US,EJ | US,EJ | |
Resistivity (at RT) | ohm.cm | ≥0.5x107 | |
Carrier Concentration | cm-3 | N/A | (0.8-8)x1018/(1-10)x1015/(0.8-8)x1018 |
Mobility | cm2/v.s | ≥1000 | 1000-2500/3000-5000/50-100 |
Etch Pit Density (EPD) | /cm2 | 1500-5000 | 100-5000/≥5000/≥500 |
Laser Marking | Upon request | Upon request | |
Thickness* | μm | (350-675)±25 | (350-675)±25 |
TTV (P/P) | μm | ≤10 | ≤10 |
TTV (P/E) | μm | ≤15 | ≤15 |
Warp | μm | ≤15 | ≤15 |
Surface | Sides 1 & 2 | Polished/Etched | Polished/Etched |
Epi-ready | Yes | Yes | |
Package | Cassette or single wafer container | Cassette or single wafer container |